Patent · US Active

MEMS actuation system

US11327276B2 · kind B2 · utility

1Cited by

0References

13Claims

0Family size

Assignee

MEMS DRIVE (NANJING) CO., LTD. · CN

Inventors

Guiqin Wang · Arcadia, US
Xiaolei Liu · Los Angeles, US
Matthew Ng · Rosemead, US

Key dates

Filing date	Jan 24, 2019
Grant date	May 10, 2022
Priority date	—
Expiry date	Dec 6, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG03B2205/0061
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A multi-axis MEMS assembly includes a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement. The micro-electrical-mechanical system (MEMS) actuator includes: an in-plane MEMS actuator, and an out-of-plane MEMS actuator. An optoelectronic device is coupled to the micro-electrical-mechanical system (MEMS) actuator. The out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.