Patent · US Active

Holding devices for receiving a plurality of substrates for the treatment thereof, treatment systems, and treatment methods

US11332819B2 · kind B2 · utility

0Cited by

8References

21Claims

0Family size

Assignee

Solayer GmbH · DE

Inventors

Harald Liepack · Dresden, DE
Thomas Merz · Hilden, DE
Sebastian Wissel · Karlstein, DE
Andreas Rack · Hanau, DE

Key dates

Filing date	May 7, 2019
Grant date	May 17, 2022
Priority date	—
Expiry date	Aug 29, 2039

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/50
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Holding devices for receiving a plurality of substrates in a substrate treatment system are disclosed. Holding devices comprise a flange, at least one segment that is releasably disposed on the flange, and at least one carrier for receiving one or a plurality of substrates. The flange has connection faces for disposing the at least one segment on the flange. The at least one segment has a segment support structure. The at least one carrier is assembled on the segment support structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.