Patent · US Active

Alignment method for a beam-directing unit of an interferometric measuring device, and measuring device for carrying out an interferometric measurement by means of laser radiation

US11333485B2 · kind B2 · utility

0Cited by

2References

16Claims

0Family size

Assignee

Polytec GmbH · CA

Inventors

Bernd Armbruster · Schenkenzell, DE
Matthias Schussler · Waldbronn, DE
Bernd Heinen · Karlsruhe, DE

Key dates

Filing date	Jun 5, 2019
Grant date	May 17, 2022
Priority date	—
Expiry date	Jun 5, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01S17/894
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An alignment method for a beam-directing unit of an interferometric measuring device for directing a laser beam of a laser beam source towards a plurality of measurement points of an object under measurement, wherein a three-dimensional model of a measurement surface of an object under measurement is created by a plurality of spatially resolved images. A measuring device for carrying out an interferometric measurement by laser radiation is also provided, having a controller which is designed to align a beam-directing unit of the measurement device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.