Metal-overcoated grating and method
US11333807B2 · kind B2 · utility
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28Claims
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Key dates
| Filing date | Jun 1, 2018 |
| Grant date | May 17, 2022 |
| Priority date | — |
| Expiry date | Jun 1, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1861
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Metallic overcoated diffraction gratings are particularly useful for high average power laser pulse compression. A dielectric oxide layer is attached to an etch-stop layer, where the dielectric oxide layer comprises a grating pattern including grating lines. Sidewalls of the grating lines taper together toward an upper surface of the dielectric oxide layer. A metallic overcoat is attached to the etch-stop layer and the dielectric oxide layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.