Patent · US Active

Fluid sensor and mass flow controller

US11334096B2 · kind B2 · utility

0Cited by

18References

10Claims

0Family size

Assignee

BEIJING SEVENSTAR FLOW CO., LTD. · CN

Inventors

Qianyi SU · 流花街道, CN
Zhihui Song · Dongguan, CN
Zhengtang Chen · Beijing, CN

Key dates

Filing date	Jul 20, 2018
Grant date	May 17, 2022
Priority date	—
Expiry date	Jul 20, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG05B2219/37371
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The present disclosure provides a fluid sensor and a mass flow controller. The fluid sensor comprises at least two measuring tubes whose diameters have a proportional relationship. The fluid sensor provided by the present disclosure can guarantee measurement accuracy in a whole measurement range and also can improve device reliability.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.