Method for detecting defects in ultra-high resolution panels
US11335222B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Jun 18, 2018 |
| Grant date | May 17, 2022 |
| Priority date | — |
| Expiry date | Jun 18, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/58
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for inspection of electrical circuits, which electrical circuits include a multiplicity of conductors which are mutually spaced from each other, the system including a voltage driver operative to apply different electrical voltages to a plurality of conductors from among the multiplicity of conductors, which plurality of conductors are in spatial propinquity to each other, a sensor operative to sense at least one characteristic of a test region defined thereby with respect to the electrical circuits, the sensor lacking sufficient spatial resolution to distinguish between the locations of individual ones of the plurality of conductors and a defect indicator responsive to at least one output of the sensor for ascertaining whether a defect exists in the plurality of conductors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.