Composite substrate and acoustic wave element using same
US11336254B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | May 30, 2017 |
| Grant date | May 17, 2022 |
| Priority date | — |
| Expiry date | Jun 5, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/706
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A composite substrate 10 includes a first substrate 10 comprised of a piezoelectric single crystal and a second substrate 20 comprised of a silicon single crystal bonded to the first substrate 10. In the second substrate, a planar orientation is (111), and ψ of Euler angles (φ, θ, ψ) is offset from 0°. Due to this, a bulk wave spurious is reduced in a specific frequency band.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.