Patent · US Active

Laser cleaning system

US11338333B2 · kind B2 · utility

1Cited by

2References

2Claims

0Family size

Assignee

INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES · CN

Inventors

Xuechun Lin · Beijing, CN
Zhiyan Zhang · Beijing, CN
Hao Liang · New Taipei, TW
Yibo Wang · Shanghai, CN
Yannan Liu · Shandong, CN
Wenhao Ma · Shandong, CN

Key dates

Filing date	Aug 18, 2017
Grant date	May 24, 2022
Priority date	—
Expiry date	Nov 25, 2037

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB08B2209/02
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A laser cleaning system including a laser source, an energy-transferring optical fiber, a laser cleaning head, a coreless motor, a connection lens barrel, and a mirror.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.