X-ray inspection apparatus and X-ray inspection method
US11340176B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 21, 2020 |
| Grant date | May 24, 2022 |
| Priority date | — |
| Expiry date | Nov 27, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/652
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The X-ray inspection apparatus includes an X-ray source, a sample moving mechanism, an X-ray detector equipped with a line sensor with pixels detecting X-ray radiation passing through a sample, an image storage unit for storing X-ray radiation intensities, an intensity correction unit for correcting the X-ray radiation intensities stored in the image storage unit, and a defect detector for detecting a defect in the sample. The intensity correction unit sets an intensity of X-rays detected from the inspection initiation region after starting inspection of the sample or an intensity of X-rays preliminarily detected from the sample before starting the inspection as a reference radiation intensity, and corrects an intensity of X-rays detected from the subsequent inspection region based on a correction coefficient obtained from comparison between the intensity of X-rays detected from the subsequent inspection region and the reference radiation intensity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.