Hydroxide-catalysis bonding of optical components used in DUV optical systems
US11340383B2 · kind B2 · utility
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21Claims
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Key dates
| Filing date | Oct 10, 2018 |
| Grant date | May 24, 2022 |
| Priority date | — |
| Expiry date | Jan 2, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2003/0093
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A compound lens assembly and method for making a compound lens assembly useful for deep ultraviolet lithography are described. The compound lens assembly includes a first lens component having an optical surface bonded to an optical surface of a second lens component. The bonding at the interface can be achieved using a hydroxide catalysis bonding technique. The compound lens assembly and process for making same solve problems relating to constringence and/or inherent birefringence known for conventional optical elements used in deep ultraviolet lithography or inspection of wafers or reticles in the DUV.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.