Patent · US Active

In-plane MEMS optical switch

US11340399B2 · kind B2 · utility

3Cited by

20References

20Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Ning Wang · Shanghai, CN
Alexander Huebel · Leonberg, DE
Christoph Schelling · Stuttgart, DE
Jan Niklas Caspers · Stuttgart, DE
Hartmut Kueppers · Reutlingen, DE
Stefan Pinter · Reutlingen, DE

Key dates

Filing date	Jul 2, 2020
Grant date	May 24, 2022
Priority date	—
Expiry date	Jul 2, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG02B2006/12145
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical switch includes a first bus waveguide supported by a substrate, an optical antenna suspended over the first bus waveguide via a spring, and interdigitated electrodes coupling the substrate with optical antenna and configured to control a position of the optical antenna relative to the first bus waveguide. When a voltage difference applied to the interdigitated electrodes is less than a lower threshold, the optical antenna is at a first position offset from the first bus waveguide, when the voltage difference applied to the interdigitated electrodes is greater than an upper threshold, the optical antenna is at a second position offset from the first bus waveguide, and the offset at the second position is greater than at the first position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.