Three-degrees-of-freedom angle adjustment device driven by piezoelectric ceramics and adjusting method thereof
US11342864B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2017 |
| Grant date | May 24, 2022 |
| Priority date | — |
| Expiry date | Sep 5, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/202
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A three-degrees-of-freedom adjustment device driven by piezoelectric ceramics includes a Z-direction deflection mechanism at a bottom, an X-direction deflection mechanism mounted at the bottom, a Y-direction deflection mechanism mounted on the X-direction deflection mechanism, and a stage mounted on a deflect block of a deflection mechanism angle output; wherein the Z-direction deflection mechanism is located at the bottom, including a mounting substrate and two pre-compressed piezoelectric stacks; the piezoelectric stacks in the Z-direction deflection mechanism deflect in a Z direction under equal voltages; the X-direction deflection mechanism is similar to the Y-direction deflection mechanism in principle, including a deflection mechanism frame and a pair of piezoelectric stacks, wherein the X-direction deflection mechanism and the Y-direction deflection mechanism are vertically mounted, and are perpendicular to the Z-direction deflection mechanism plane as a whole.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.