Patent · US Active

Multi-zone pedestal heater without vias

US11343879B2 · kind B2 · utility

0Cited by

10References

14Claims

0Family size

Assignee

WATLOW ELECTRIC MANUFACTURING COMPANY · US

Inventors

Kevin Ptasienski · O'Fallon, US
Stanton Hopkins Breitlow · Winona, US
Mohammad Nosrati · Redwood City, US
Kevin Smith · Columbia, US
Brittany Phillips · Chesterfield, US
Ken Ames · San Jose, US
Patrick Margavio · Columbia, US
Kurt English · Columbia, US

Key dates

Filing date	Nov 20, 2018
Grant date	May 24, 2022
Priority date	—
Expiry date	Jun 12, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH05B2203/035
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.