Polycrystalline silicon bar, polycrystalline silicon rod, and manufacturing method thereof
US11345603B2 · kind B2 · utility
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12Claims
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Key dates
| Filing date | Dec 17, 2019 |
| Grant date | May 31, 2022 |
| Priority date | — |
| Expiry date | Sep 13, 2040 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B35/007
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
In a step of performing cylindrical grinding of a polycrystalline silicon bar 10 grown by a Siemens method, this cylindrical grinding step is performed such that a polycrystalline silicon rod 30, whose center axis CR is shifted from a center axis C0 of a silicon core wire 20 by 2 mm or more, is manufactured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.