Device for depositing nanometric sized particles onto a substrate
US11345989B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2019 |
| Grant date | May 31, 2022 |
| Priority date | — |
| Expiry date | Mar 12, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/20228
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A device (1) for coating a substrate (4) with nanometric sized particles, wherein the device comprises: a plurality of aerodynamic lenses able to product a jet (3) of nanometric sized particles, each of the aerodynamic lenses having a longitudinal axis, the aerodynamic lenses being arranged so that the various longitudinal axes are parallel and oriented in a first direction (X) defining the direction of propagation of the jet and in the form of at least two columns (9, 10) offset from each other in a second direction (Y) orthogonal to the first direction, where the first and the second column each comprise at least one of the aerodynamic lenses, the at least one of the aerodynamic lenses of the first column also being offset relative to the at least one of the aerodynamic lenses of the second column in a third direction (Z) that is both orthogonal to the first direction and to the second direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.