Interferometer device and method for operating an interferometer device

US11346721B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Christoph Daniel Kraemmer · Malsch, DE
• Maximilian Busch · Reutlingen, DE
• Michael Kutschbach · Wolfschlugen, DE
• Reinhold Roedel · Reutlingen, DE

Key dates

• Filing date: Jul 9, 2020
• Grant date: May 31, 2022
• Expiry date: Jul 9, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J3/0297
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An interferometer device includes an interferometer unit with at least two mirrors disposed in parallel, wherein at least one of the mirrors is actuatable parallel to the other mirror and a first distance between the two mirrors is alterable. The interferometer device further includes at least one deflection mirror disposed downstream of the interferometer unit in a light transmission direction of light from the interferometer unit and a detector device, onto which the light is able to be aligned by the deflection mirror. The detector device includes at least two differently sensitive detection regions for transmitted wavelengths or wavelength ranges of the light, which detection regions are spatially separated from one another and able to be irradiated separately by the deflection mirror.