QTIP—quantitative test interferometric plate
US11346747B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 27, 2017 |
| Grant date | May 31, 2022 |
| Priority date | — |
| Expiry date | Dec 11, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M11/0207
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for testing an optical surface, the system comprising a non-coherent light source, a detector, a test plate positioned between the non-coherent light source and the optical surface, the test plate separated from the optical surface by a gap, and a processor. The processer is configured to cause the non-coherent light source to illuminate the test plate and optical surface with non-coherent light, control the detector to capture an interferogram produced by interference between light reflected from the test plate and light reflected from the optical surface, and perform quantitative analysis on the interferogram to characterize aberrations in the optical surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.