Saw-toothed electrode and method for enhancing performance of nanowire UV detector

US11349036B2 · kind B2 · utility

Assignee

• BEIJING UNIVERSITY OF TECHNOLOGY · CN

Inventors

• Zhiyuan Gao · 流花街道, CN
• Liwei Lu · Konstanz, DE
• Lihuan Zhao · Beijing, CN
• Deshu Zou · Beijing, CN

Key dates

• Filing date: Mar 17, 2020
• Grant date: May 31, 2022
• Expiry date: Mar 17, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F77/1437

Abstract

The present invention discloses a saw-toothed electrode and a method for enhancing the performance of a nanowire UV detector, and relates to the field of semiconductor technologies. The saw-toothed electrode includes two symmetrically arranged patterns; the pattern includes a rectangle and multiple isosceles trapeziums; lower bases of the isosceles trapeziums are connected to a same long side of the rectangle; opposite sides of the two patterns are sides on which multiple isosceles trapeziums are located; equal-length legs and the upper base of the isosceles trapezium are used to grow nanowires; and nanowires grown on upper bases of two isosceles trapeziums, symmetric to each other, on the opposite sides of the two patterns form bridges.