Two port mems silicon flow control valve
US11353140B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 29, 2020 |
| Grant date | Jun 7, 2022 |
| Priority date | — |
| Expiry date | Jan 10, 2041 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K99/0036
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A microvalve includes a first plate having a surface defining an actuator cavity. A second plate has a surface that abuts the surface of the first plate and includes a displaceable member that is disposed within the actuator cavity for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve. An actuator is connected to the displaceable member. The displaceable member includes a sealing portion having a plurality of elongated control arms extending inwardly from one end thereof, wherein the control arms are configured as a valve closing members for each of a plurality of fluid flow openings in the first plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.