Patent · US Active

Method and apparatus for determining a wavefront of a massive particle beam

US11355311B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Joachim Welte · Speyer, DE
Markus Bauer · Oberkochen, DE

Key dates

Filing date	Mar 27, 2020
Grant date	Jun 7, 2022
Priority date	—
Expiry date	Mar 27, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2614
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The present application relates to a method and an apparatus for determining a wavefront of a massive particle beam, including the steps of: (a) recording two or more images of a reference structure using the massive particle beam under different recording conditions; (b) generating point spread functions for the two or more recorded images with a modified reference image of the reference structure; and (c) performing a phase reconstruction of the massive particle beam on the basis of the generated point spread functions and the different recording conditions, for the purposes of determining the wavefront.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.