Chuck plate, annealing device, and annealing method
US11355344B2 · kind B2 · utility
0Cited by
5References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 12, 2020 |
| Grant date | Jun 7, 2022 |
| Priority date | — |
| Expiry date | Aug 7, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A chuck plate is disposed between an annealing object and a holding table. The chuck plate has a function of attenuating thermal radiation light radiated from the annealing object and directed toward the holding table. The use of the chuck plate makes it possible to increase the accuracy of temperature measured by detection of thermal radiation light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.