Acoustic resonators and filters with reduced temperature coefficient of frequency
US11356077B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 27, 2021 |
| Grant date | Jun 7, 2022 |
| Priority date | — |
| Expiry date | Aug 27, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/568
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices and filters. An acoustic resonator includes a substrate and a lithium niobate plate. A back surface of the lithium niobate plate faces the substrate. A portion of the lithium niobate plate forms a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is on a front surface of the lithium niobate plate such that interleaved fingers of the IDT are on the diaphragm. The IDT and the lithium niobate plate are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode within the diaphragm. Euler angles of the lithium niobate plate are [0°, β, 0° ], where β is greater than or equal to 40° and less than or equal to 70°.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.