Patent · US Active

Tilted slit confocal system configured for automated focus detection and tracking

US11356594B1 · kind B1 · utility

2Cited by

8References

35Claims

0Family size

Assignee

KLA Corporation · US

Inventors

Brooke Bruguier · San Jose, US
Xiumei Liu · Tianjin, CN
Qiang Zhang · Dalian, CN
Stephen Taylor · Tallmadge, US

Key dates

Filing date	Aug 17, 2020
Grant date	Jun 7, 2022
Priority date	—
Expiry date	Nov 11, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG02B21/16
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A system for automated focus tracking of a sample is disclosed. The system comprises an illumination source, a set of illumination optics in an illumination path, a set of collection optics in a collection path, a first slit device in the illumination path, a second slit device in the collection path, at least one detector configured to generate an image of the sample, and a controller configured to receive through-focus information from the image, and provide corrective motion to a stage holding the sample to maintain a position of the sample at a selected focus. A method for automated focus tracking of a sample is also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.