Detector of electromagnetic radiation and in particular infrared radiation, and process for producing said detector
US11359971B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 29, 2017 |
| Grant date | Jun 14, 2022 |
| Priority date | — |
| Expiry date | Dec 29, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/3504
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An infrared radiation detector includes an array of elementary imaging bolometric detectors, each of the elementary bolometric detectors being formed of a bolometric membrane including a film made of vanadium oxide VOx, having a resistivity in the range from 6 ohm·cm to 50 ohm·cm, said membrane being suspended above a substrate integrating a signal for reading out the signal generated by said elementary detectors and for sequentially addressing the elementary detectors. The detector includes at least one getter intended to ensure the trapping of residual gas during and after the forming of the detector, and includes a hermetically-sealed cavity having said array and said at least one getter housed therein, having an upper cap including a window transparent to infrared radiation, said cap being sealed by means of a seal on a chip supporting the array of elementary detectors or on a package at the bottom of which the chip supporting the array of elementary detectors has been attached, said cavity being under vacuum or a low pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.