Multipoint surface temperature measurement system and method thereof
US11359976B2 · kind B2 · utility
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66References
9Claims
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Key dates
| Filing date | Oct 22, 2021 |
| Grant date | Jun 14, 2022 |
| Priority date | — |
| Expiry date | Oct 22, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K2213/00
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Examples of a fiber optic temperature measuring system for measuring a temperature of a surface at multiple points simultaneously in real time is provided. The fiber optic temperature measuring system comprises a fiber optic probe with fiber bundle with plurality of individual fibers with thermographic phosphor at the fiber's tip and a high-speed camera. Invention allows accurate multipoint measurement of ESC' surface temperature. The thermographic phosphor is embedded in a nudge at the tip of each individual fibers or on the surface (under the surface) at predetermined positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.