Patent · US Active

MEMS optical switch with stop control

US11360270B2 · kind B2 · utility

2Cited by

20References

20Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Ning Wang · Shanghai, CN
Christoph Schelling · Stuttgart, DE
Alexander Huebel · Leonberg, DE
Hartmut Kueppers · Reutlingen, DE
Stefan Pinter · Reutlingen, DE
Uma Krishnamoorthy · Berkeley, US

Key dates

Filing date	Jul 2, 2020
Grant date	Jun 14, 2022
Priority date	—
Expiry date	Jul 31, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG02B2006/12145
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical switch includes a bus waveguide supported by a substrate, an actuation electrode supported by the substrate, the actuation electrode having fins that protrude in a direction perpendicular to the substrate and to the bus waveguide, and a reaction electrode having interdigitated fins configured to form a comb drive with the actuation electrode. When a voltage difference between the reaction electrode and the actuation electrode is less than a lower threshold, the reaction electrode is positioned a first distance from the bus waveguide, when the voltage difference between the reaction electrode and the actuation electrode is greater than an upper threshold, the reaction electrode is positioned a second distance from the bus waveguide, and the second distance is less than the first distance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.