Electrode-defined unsuspended acoustic resonator
US11362640B2 · kind B2 · utility
5Cited by
0References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 14, 2020 |
| Grant date | Jun 14, 2022 |
| Priority date | — |
| Expiry date | May 14, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02834
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk acoustic resonator operable in a bulk acoustic mode includes a resonator body mounted to a separate carrier that is not part of the resonator body. The resonator body includes a piezoelectric layer, a device layer, and a top conductive layer on the piezoelectric layer opposite the device layer. The piezoelectric layer is a single crystal of LiNbO3 cut at an angle of 130°±30°. A surface of the device layer opposite the piezoelectric layer is for mounting the resonator body to the carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.