Polarization apparatus
US11363707B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 2, 2020 |
| Grant date | Jun 14, 2022 |
| Priority date | — |
| Expiry date | Dec 15, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/2425
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A polarization apparatus includes a conductive carrier, a dielectric barrier discharge (DBD) plasma source, an electric net, a DBD power supply, and a DC power supply. The conductive carrier has a carrying surface which is configured to carry a work piece. The work piece includes a piezoelectric material film, and the conductive carrier is grounded. The DBD plasma source is disposed over the carrying surface and is configured to apply plasma toward the piezoelectric material film. The electric net is disposed between the carrying surface and the DBD plasma source. The DBD power supply includes a first electrode and a second electrode, in which the first electrode is electrically connected to the DBD plasma source, and the second electrode is grounded. The DC power supply includes a third electrode and a fourth electrode. The third electrode is electrically connected to the electric net, and the fourth electrode is grounded.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.