XY macro-micro motion stage and control method thereof based on end feedback
US11365960B1 · kind B1 · utility
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7Claims
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Key dates
| Filing date | Jan 21, 2022 |
| Grant date | Jun 21, 2022 |
| Priority date | — |
| Expiry date | Jan 21, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B5/0007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An XY macro-micro motion stage and a control method thereof based on end feedback. The XY macro-micro motion stage includes a fine-adjusting assembly, a macro-driving assembly and an XY position detecting device. The macro-driving assembly includes an X-direction macro-driving unit, a Y-direction macro-driving unit, an X-direction mounting plate and a Y-direction mounting plate. The XY position detecting device is configured to obtain its position on the X axis and Y axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.