Method and device for substantially eliminating optical damage in lithium niobate devices
US11366268B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 14, 2020 |
| Grant date | Jun 21, 2022 |
| Priority date | — |
| Expiry date | Sep 14, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2202/20
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An integrated optical device includes a substrate. A waveguide includes a lithium niobate. A TiO2 coating is disposed at least in part over a longitudinal surface of the waveguide as a coated waveguide supported by the substrate. A silicon oxide substantially can cover and surround the waveguide in cross section over a longitudinal direction of said waveguide as an optical cladding. A method for substantially eliminating optical damage in lithium niobate devices is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.