Method for detecting particles using structured illumination
US11366303B2 · kind B2 · utility
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53References
22Claims
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Key dates
| Filing date | Jan 30, 2019 |
| Grant date | Jun 21, 2022 |
| Priority date | — |
| Expiry date | Jun 17, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V2201/04
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A particle detection method detects presence and location of particles on a target using measured signals from a plurality of structured illumination patterns. The particle detection method uses measured signals obtained by illuminating the target with structured illumination patterns to detect particles. Specifically, the degree of variation in these measured signals in raw images is calculated to determine whether a particle is present on the target at a particular area of interest.
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