Support of an optical element

US11366393B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Eugen Anselm · Aalen, DE
• Karl Fenkl · Illertissen, DE
• Christoph Müller · Bern, CH
• Ralf Moser · Abensberg, DE

Key dates

• Filing date: Feb 3, 2020
• Grant date: Jun 21, 2022
• Expiry date: Feb 3, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70316
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical arrangement of an imaging device for microlithography, particularly for using light in the extreme UV range, includes an optical element and a holding device for holding the optical element. The optical element includes an optical surface and defines a plane of main extension, in which the optical element defines a radial direction and a circumferential direction. The holding device includes a base element and more than three separate holding units. The holding units are connected to the base element and arranged in a manner distributed along the circumferential direction and spaced apart from one another. The holding units hold the optical element with respect to the base element. Each of the holding units establishes a clamping connection between the optical element and the base element. The clamping connection for each holding unit is separate from the clamping connections of the other holding units.