Patent · US Active

Integration of photonics optical gyroscopes with micro-electro-mechanical sensors

US11371843B2 · kind B2 · utility

1Cited by

3References

12Claims

0Family size

Assignee

Anello Photonics, Inc. · US

Inventors

Avi Feshali · Los Angeles, US
Mike Horton · Santa Clara, US

Key dates

Filing date	Jul 1, 2021
Grant date	Jun 28, 2022
Priority date	—
Expiry date	Jul 1, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG02B2006/12138
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Aspects of the present disclosure are directed to monolithically integrating an optical gyroscope fabricated on a planar silicon platform as a photonic integrated circuit with a MEMS accelerometer on the same die. The accelerometer can be controlled by electronic circuitry that controls the optical gyroscope. Gaps may be introduced between adjacent waveguide turns to reduce cross-talk and improve sensitivity and packing density of the optical gyroscope.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.