Micromirror with improved shock and vibration performance having differing hinge portions
US11372234B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 4, 2019 |
| Grant date | Jun 28, 2022 |
| Priority date | — |
| Expiry date | Oct 4, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/105
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A layered hinge design providing an improved shock and vibration performance for a two-axis MEMS Micromirror featuring combs drive actuation with independent drive and control for rotating the Micromirror along two-axis of rotation. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, a plurality of actuation voltages are driven via conductive layers forming one or more hinges allowing the Micromirror to rotate along the two-axis of rotation. The layered hinge design achieves set angles that are highly stable over time and provides a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.