Pellicle comprising graphite thin film
US11372326B2 · kind B2 · utility
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13Claims
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Key dates
| Filing date | Sep 4, 2020 |
| Grant date | Jun 28, 2022 |
| Priority date | — |
| Expiry date | Oct 13, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/64
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The present disclosure relates to a pellicle that can achieve both a high EUV transmittance and a uniformity in EUV transmittance by including a graphite thin film having a film thickness of 5 nm or more and 30 nm or less and a surface roughness (Sa) of 0.1 nm or more and 500 nm or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.