Corrosion-resistant components and methods of making
US11376822B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 12, 2017 |
| Grant date | Jul 5, 2022 |
| Priority date | — |
| Expiry date | Apr 4, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67069
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A corrosion-resistant component configured for use with a semiconductor processing reactor, the corrosion-resistant component comprising: a) a ceramic insulating substrate; and, b) a white corrosion-resistant non-porous outer layer associated with the ceramic insulating substrate, the white corrosion-resistant non-porous outer layer having a thickness of at least 50 μm, a porosity of at most 1%, and a composition comprising at least 15% by weight of a rare earth compound based on total weight of the corrosion-resistant non-porous layer; and, c) an L* value of at least 90 as measured on a planar surface of the white corrosion-resistant non-porous outer layer. Methods of making are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.