Transversely-excited bulk acoustic resonator split ladder filter
US11381221B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 12, 2020 |
| Grant date | Jul 5, 2022 |
| Priority date | — |
| Expiry date | Jan 2, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/725
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Filter devices. A first chip includes a first interdigital transducer (IDT) of a first acoustic resonator formed on a surface of a first piezoelectric wafer having a first thickness, interleaved fingers of the first IDT disposed on a portion of the first piezoelectric wafer spanning a first cavity in a first base. A second chip includes a second IDT of a second acoustic resonator formed on a surface of a second piezoelectric wafer having a second thickness less than the first thickness, interleaved fingers of the second IDT disposed on a portion of the second piezoelectric wafer spanning a second cavity in a second base. A circuit card coupled to the first chip and the second chip includes at least one conductor for making an electrical connection between the first IDT and the second IDT.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.