Multi-zone pedestal heater having a routing layer
US11382180B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2018 |
| Grant date | Jul 5, 2022 |
| Priority date | — |
| Expiry date | Jun 27, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2203/035
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present disclosure provides a support pedestal that includes a support member including a resistive layer having at least two zones, a routing layer, and a plurality of conductive vias. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of vias. The number of zones of the resistive layer is greater than or equal to a number of wires coupled to the routing layer. The routing layer may include a plurality of arm portions that extend from a central region of the routing layer. The support pedestal may further include a second resistive layer disposed along the same plane as the routing layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.