Robot arm for holding cassette and automatic cassette transfer device
US11383940B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2017 |
| Grant date | Jul 12, 2022 |
| Priority date | — |
| Expiry date | Nov 11, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67379
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A robotic manipulator for handling a cassette and an automated cassette transport device are disclosed, the device including a mechanical arm (1), an end actuator (2) at an end of the mechanical arm (1) and a vision-based locating assembly (3) on the end actuator (2). On the one hand, the vision-based locating assembly (3) can determine the position of a flange of the cassette, thereby identifying the cassette. In other words, the cassette can be identified based on a feature of the cassette itself. This dispense with a separate locating marker while improving cassette measuring and handling accuracy. On the other hand, transportation of the cassette is allowed by complementary retention of its flange on a recessed surface of the end actuator (2).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.