Method of making thin films
US11384450B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Jun 13, 2019 |
| Grant date | Jul 12, 2022 |
| Priority date | — |
| Expiry date | Jul 13, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/787
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Embodiments disclosed herein include potassium sodium niobate (KNN) films and methods of making such films. In an embodiment, a method of forming a potassium sodium niobate (KNN) film comprises preparing a solution comprising water, potassium hexaniobate salts, and sodium hexaniobate salts. In an embodiment, the solution is spin coated onto a substrate to form a film on at least a portion of a surface of the substrate. In an embodiment, the method may further comprise heat treating the film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.