Out-of-plane hinge for a micromechanical and/or nanomechanical structure with a reduced sensitivity to internal stresses
US11384789B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 6, 2020 |
| Grant date | Jul 12, 2022 |
| Priority date | — |
| Expiry date | Nov 13, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0163
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A hinge between a support and a movable part in an out-of-plane direction of a microelectromechanical structure includes two torsion beams, and two bending elements connecting the movable part and the support and each comprising two beams extending perpendicularly to the axis of rotation. Each beam is connected to the support by a first end and to the movable part by a second end, the first ends and the second ends of the beams being disposed with respect to one another in such a way that the orientation of the first end towards the second end of one beam is opposite to the orientation of the first end towards the second end of the other beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.