Multiple protective film on near-field transducer of heat-assisted magnetic recording device
US11386922B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2021 |
| Grant date | Jul 12, 2022 |
| Priority date | — |
| Expiry date | Jun 11, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B2005/0021
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A heat-assisted magnetic recording (HAMR) head has a protective multilayer confined to a window of the disk-facing surface of the slider that surrounds the near-field transducer (NFT) end and write pole end. The protective multilayer is made up of a first film of silicon nitride directly on and in contact with the NFT end and the write pole end and a second film of a metal oxide on and in contact with the silicon nitride film. The silicon nitride film is preferably formed by RIBD but is thin enough so that it does not contain any significant amount of other compounds. The metal oxide is preferably silicon dioxide, or alternatively an oxide of hafnium, tantalum, yttrium or zirconium, and together with the silicon nitride film provides a protective multilayer of sufficient thickness to be optically transparent to radiation and resistant to thermal oxidation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.