Interferometer and method for producing an interferometer

US11391629B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Ralf Noltemeyer · Wernau, DE
• Christian Huber · Zwingenberg, DE
• Reinhold Roedel · Reutlingen, DE
• Benedikt Stein · Stuttgart, DE
• Christoph Schelling · Stuttgart, DE
• Christoph Daniel Kraemmer · Malsch, DE

Key dates

• Filing date: Apr 10, 2019
• Grant date: Jul 19, 2022
• Expiry date: May 30, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J2003/1247
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An interferometer includes a holding element having an actuation recess, a first mirror element arranged on the holding element opposite the actuation recess, and a second mirror element arranged opposite the first mirror element at a mirror distance, to form an optical slit. The first mirror element is arranged between the second mirror element and the holding element and the optical slit is spatially separated from the actuation recess by the first mirror element. The interferometer further includes an electrode pair including a first actuation electrode in one of the mirror elements and a second actuation electrode on a side of the actuation recess opposite the first actuation electrode. The mirror distance can be varied by applying an electrical voltage to the electrode pair.