Techniques for controlling effective refractive index of gratings
US11391950B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 23, 2020 |
| Grant date | Jul 19, 2022 |
| Priority date | — |
| Expiry date | Jun 23, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2027/0178
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A surface-relief structure comprises a surface-relief grating including a first material characterized by a first refractive index, a first layer of a second material having a second refractive index conformally deposited on surfaces of the surface-relief grating, and a second layer of a third material having a third refractive index conformally deposited on the first layer. The effective refractive index of the combination of the first layer and the second layer is less than, equal to, or greater than the first refractive index, thereby increasing the duty cycle and/or modifying the overall refractive index of the surface-relief structure. The first layer and the second layer are deposited using, for example, atomic layer deposition techniques.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.