Hafnium-zirconium oxide (HZO) ferroelectric transducer and method of making the same
US11393973B2 · kind B2 · utility
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Key dates
| Filing date | Nov 22, 2019 |
| Grant date | Jul 19, 2022 |
| Priority date | — |
| Expiry date | Dec 1, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02496
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A nano-mechanical acoustical resonator is designed and fabricated with CMOS compatible techniques to apply to mm-wave RF front-ends and 5G wireless communication systems which have extreme small scale and integrated in 3D sensors and actuators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.