Mask frame assembly for depositing thin film
US11396030B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 6, 2019 |
| Grant date | Jul 26, 2022 |
| Priority date | — |
| Expiry date | Aug 29, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask frame assembly includes: a mask frame; at least one mask sheet arranged on the mask frame; a plurality of first support sticks extending in a first direction; and a plurality of second support sticks extending in a second direction, wherein a mask frame transformation index is within a range from about −1000 to about +1000 based on mask frame transformation index=Σ (tensile force of first support sticks/tensile rate of first support sticks)−Σ (tensile force of second support sticks/tensile rate of second support sticks), where tensile force of respective first or second support stick is given by thickness (T)×width (W)×elastic coefficient (E)×tensile rate (δ/L0), δ is a transformed amount (Lf−L0) corresponding to tension, L0 is an initial length of respective first or second support stick, and Lf is a final length of respective first or second support stick.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.