Substrate, alignment method and alignment device
US11398435B2 · kind B2 · utility
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8Claims
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Key dates
| Filing date | Dec 26, 2019 |
| Grant date | Jul 26, 2022 |
| Priority date | — |
| Expiry date | Mar 7, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54486
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
The present disclosure provides a substrate, an alignment method and an alignment device. The substrate includes an alignment mark and an auxiliary alignment mark. A shape of the auxiliary alignment mark is different from a shape of the substrate alignment mark.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.