Detection substrate, preparation method thereof, detection device and detection method
US11398590B2 · kind B2 · utility
1Cited by
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17Claims
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Key dates
| Filing date | Jul 9, 2020 |
| Grant date | Jul 26, 2022 |
| Priority date | — |
| Expiry date | Oct 8, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/0362
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A detection substrate, a preparation method thereof, a detection device and a detection method are provided. A detection substrate includes a base substrate, wherein the base substrate includes multiple through holes, and electrode columns are embedded in the multiple through holes; the base substrate comprises a detection region and a bonding pad region, the detection region includes a driving circuit, and the bonding pad region is provided with bonding pads; and the bonding pads are connected with the electrode columns through the driving circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.