Variable-temperature and fast-sintering process of aluminum-doped zinc oxide target material
US11401600B1 · kind B1 · utility
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Key dates
| Filing date | Sep 29, 2021 |
| Grant date | Aug 2, 2022 |
| Priority date | — |
| Expiry date | Sep 29, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/96
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A variable-temperature and fast-sintering process for an alumina-doped zinc oxide target material is provided. Integrated degreasing and sintering processes are carried out on an alumina-doped zinc oxide biscuit, The degreasing process is carried out in air atmosphere, and a high-density alumina-doped zinc oxide target material is produced by a variable-temperature treatment during the sintering process under a state of circulating controllable mixed atmosphere. The mixed atmosphere is air and oxygen. As a result, a sintering time is greatly reduced, so that a fast-activated sintering is realized to inhibit grain growth.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.