Spectral measurement device and spectral measurement method
US11402270B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 13, 2019 |
| Grant date | Aug 2, 2022 |
| Priority date | — |
| Expiry date | Jun 13, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/3595
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A combining light emitted from a measurement point of an object to be measured into one parallel light beam by combining optical system; dividing, by phase shifter, parallel light beam emitted from combining optical system into first and second light beam, emitting first and second light beam toward light-receiving face while providing an optical path length difference between the first and second light beam, and causing the first and second light beam to planarly enter the light-receiving face so that at least a part of an incident region of first light beam on the light-receiving face and at least a part of an incident region of second light beam overlap with each other; and obtaining an interferogram at measurement point based on intensity distribution of light in a region where an incident region of the first and second light beam on light-receiving face overlap, and acquiring spectrum by Fourier-transforming interferogram.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.